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发明名称
SEMICONDUCTOR DEVICE MANUFACTURING DEVICE
摘要
申请公布号
JPH06252110(A)
申请公布日期
1994.09.09
申请号
JP19930039049
申请日期
1993.02.26
申请人
N T T ELECTRON TECHNOL KK;DOI TOSHIRO;RODEELE NITTA KK
发明人
SAKURAI TETSUTADA;DOI TOSHIRO;HAYASHI YONEJI
分类号
H01L21/02;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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