| 摘要 |
PURPOSE:To provide a highly accurate vibrating type rate gyro-sensor which can be manufactured easily, does not fluctuate, and can easily cope with a plurality of measuring axes. CONSTITUTION:The vibrating type rate gyro-sensor is constituted by sticking a piezoelectric body 3 provided with electrodes 2 to the upper surface of a square-pole metallic vibrating body 1 and the vibrating body 1 vibrates while the body 1 is supported by supporting pins 4 at its four corners. The long piezoelectric body 3 integrally formed with the vibrating body 1 covers most of the upper surface of the body 1 and an exciting electrode 2-1 for exciting the body 1 is provided at the center on the surface of the body 3. In addition, angular velocity detecting electrodes 22 and 2-3 are respectively provided on both sides of the electrode 2-1 in the axial direction of the body 1. The electrodes 2-2 and 2-3 are respectively deviated leftward and rightward from the axial center of the piezoelectric body 3 (namely, from a plane parallel to the axial center of the vibrating body 1). |
