| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection method of a color-filter substrate for feeding the color filter substrate, such that the shortest distance between the end part of a coloring matter coated part containing an apparatus mark and the end part of the substrate is 10 mm or smaller, while grasping the position of 0-10 mm from the end part of a substrate to be inspected by a fixing chuck for inspecting the flaw of the color filter substrate, and to provide a flaw inspection device of the color-filter substrate. SOLUTION: In the flaw inspection method of the color-filter substrate having at least one screen part, wherein a black matrix and a plurality of rectangular pixels of red, blue and green are two-dimensionally arranged on a rectangular transparent substrate and having at least one of a region to be inspected and an alignment mark in a region separated from either one of four sides of the transparent substrate by 10 mm or smaller, the color filter substrate and the flaw inspection device are relatively moved, while grasping the vicinities of two opposed sides of the transparent substrate by the fixing chuck, to perform primary flaw inspection and the color-filter substrate and the flaw inspection device are subsequently moved in a direction of crossing the relative moving direction in primary flaw inspection, at right angles to perform secondary flaw inspection. COPYRIGHT: (C)2008,JPO&INPIT |
