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发明名称
INSPECTION METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03239342(A)
申请公布日期
1991.10.24
申请号
JP19900037028
申请日期
1990.02.16
申请人
SUMITOMO METAL IND LTD
发明人
FUJITO MANABU
分类号
H01L29/78;H01L21/66
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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