| 摘要 |
<p>Process and system for purifying high purity helium group feed gas containing at least one of oxygen, hydrogen or moisture, which comprises: (a) passing said high purity helium group gas through at least one first vessel (100) containing desiccants, adsorbents and/or oxidation catalysts at a temperature of about -40<0>F to about 150<0>F and a pressure of about 1 psig to about 250 psig; (b) passing the purified high purity helium group gas from said at least one first vessel (100) to at least one second vessel (200) containing desiccants, adsorbents and/or oxidation catalysts at a temperature of about -40<0>F to about 150<0>F and a pressure of about 1 psig to about 250 psig, said temperature and pressure conditions being substantially identical to those used in said at least one first vessel; (c) sampling (144) the purified high purity helium group gas derived from said at least one first vessel periodically as said purified high purity helium group gas is passed to said at least one second vessel; said sampling being used to determine the purity level of said purified high purity helium group gas and the flow arrangement for said high purity helium group feed gas; and (d) recovering the resulting helium group gas product from said at least one second vessel. <IMAGE></p> |
