Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device

摘要

A remote control system for one or more semiconductor manufacturing apparatuses is provided with a supervisory device that control one or more of the semiconductor manufacturing apparatuses and a remote operation device that accesses the supervisory device through a communication line. Upon access, the supervisory device the remote carries performs the same operation as that carried out by the supervisory device on one or more of the semiconductor manufacturing apparatuses. The remote operation device replace operation parameter files of the supervisory device through remote control.