| 摘要 |
There is provided an inspection apparatus having a configuration which can suppress attenuation of an electromagnetic wave caused by an environment surrounding the inspection apparatus and can readily prevent an unwanted substance from being contaminated into a propagation path of the electromagnetic wave. The inspection apparatus 100 includes a substrate 103 having therein a structure for holding an inspected object 104, an electromagnetic wave transmitting portion 101 having an antenna structure, and an electromagnetic wave receiving portion 102 having an antenna structure. The electromagnetic wave transmitting portion 101 and the electromagnetic wave receiving portion 102 are disposed in contact with the substrate 103.
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