Generating method, creating method, exposure method, and storage medium

摘要

The present invention provides a method of generating, by a computer, data on patterns of a plurality of originals for use in multiple exposure, in which a single-layer pattern is formed on a substrate by exposing the substrate a plurality of times, in an exposure apparatus including an illumination optical system which illuminates an original with light from a light source, and a projection optical system which projects a pattern of the original onto a substrate.

主权项

1. A method of manufacturing a plurality of originals for use in multiple exposures, in which a single-layer pattern is formed on a substrate by exposing the substrate a plurality of times, in an exposure apparatus including an illumination optical system which illuminates an original, and a projection optical system which projects a pattern of the original onto a substrate, the method comprising:
generating data of patterns of the plurality of originals by a computer, and forming a pattern on the plurality of originals based on the generated data, wherein the generating comprising: a first step of generating a map by sequentially defining as a pattern element of interest a plurality of pattern elements of a temporary target pattern corresponding to a pattern to be formed on the substrate, and mapping positions of pattern elements other than the pattern element of interest relative to the pattern element of interest using a position of the pattern element of interest as an origin; a second step of selecting pattern elements with a periodicity from the map generated in the first step, and determining an effective source in a pupil plane of the projection optical system corresponding to an array pattern of the selected pattern elements among a plurality of predetermined effective sources; a third step of postulating a pupil filter which transmits light in a region with an intensity value larger than a predetermined value in the effective source determined in the second step, on a pupil plane of the projection optical system; a fourth step of calculating an intensity distribution formed on an image plane of the projection optical system by the light having passed through the pupil filter, postulated in the third step, when the effective source determined in the second step illuminates the plurality of pattern elements of the temporary target pattern in the first step placed on an object plane of the projection optical system; a fifth step of specifying a peak position where an intensity has a peak in the intensity distribution calculated in the fourth step; a sixth step of extracting a first pattern element corresponding to the peak position, specified in the fifth step, from the plurality of pattern elements of the temporary target pattern in the fourth step; and a seventh step of generating data on a pattern including the first pattern element extracted in the sixth step as data on a pattern of one original of the plurality of originals, wherein a cycle including the first step to the seventh step is repeated using a pattern including a second pattern element obtained by excluding the first pattern element extracted in the sixth step from the plurality of pattern elements of the temporary target pattern in the fourth step as a new temporary target pattern, and the repetition is ended in a round of the cycle, in which a number of the second pattern element becomes zero.