| 摘要 |
1,189,344. Coating with metals. MATSUSHITA ELECTRONICS CORP. June 12, 1967 [June 20, 1966], No. 27056/67. Heading C7F. Groups IV and V transition metals Nb, Ta, V, Ti, Zr are deposited on a substrate maintained at 350‹ -700‹ C. from a gas mixture of hydrogen and a gaseous halogen compound of the metal, the gas mixture being pre-heated by a mesh or porous pre-heater plate in the evacuated reaction tube prior to contacting the substrate. The substrate may be ceramic, quartz or a metal and the gas mixture is pre-heated to 600‹ -1300‹C. As shown in Fig. 2 the gas mixture enters reaction tube 11 via 12, is pre-heated by pre-heater 8 made of porous or mesh like Mo, Ta or C the heating being induction, resistance or infrared. The preheater is located 0À3-2 cms. from the substrate 15 which is heated by induction heater 13. |
