| 摘要 |
PURPOSE: To enable fast scanning of a curved surface to be smoothly performed by facilitating the handling of an object to be measured without enlarging on inspection device as a whole more than necessary by positioning the object to be measured having a complicated curved surface on a skirter using a 5-axis control with a simple shape. CONSTITUTION: A support frame 5 is moved vertically by a Z-axis drive mechanism along a support pole 5 and a moving truck 7 is advanced on an orbit 8 by a Y-axis drive mechanism. Then, a skirter 6 is moved horizontally along the support frame 5 by an X-axis drive mechanism while a clamp frame 11 clamping an object to be measured is being turned longitudinally in the direction of moving of the truck 7 by a rotation mechanism 12 (A-axis drive mechanism) driven by an actuator 13 and the skirter 6 on the receiving side is moved by an S axis drive mechanism to adjust the distance to the object to be measured. By this 5-axis control, the object to be measured is positioned on the skirter 6 at a fixed distance therefrom, thereby enabling fast scanning of a curved surface with a remote control of a clamping mechanism and the scanning of the skirter 6 alone. |
