| 摘要 |
PURPOSE: To provide a substrate feeding device which can be reduced in space and cost and, at the same time, can save the time and labor of substrate supplying work. CONSTITUTION: A substrate feeding device A is provided with an elevating/ lowering base 31 and substrate throwing-in cylinder and the base 31 is provided with an arm 61 equipped with vacuum pads 63, 63,... which attract substrates by suction and receiving rails 57 and 57 which can be freely opened and closed. The arm 61 is constituted in such a way that the arm 61 can retreat to a position where the arm 61 does not interfere with a housing rack 4 when the arm 61 has placed the rack 4 on the supporting conveyor 46 of the base 31. |
