PRESSURE SENSOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To improve the detection accuracy of pressure change without making a device large. SOLUTION: This pressure sensor is provided with a pressure sensor chip 1 made of single crystal silicon in which a diaphragm 1d is of plane parallelogram having two pairs of first and second opposite anglesϕandθand is formed thin partly by providing a recessed part 1c and its surface is of (110) plane, and the sensor detects a change in pressure according to the amount of strain of the diaphragm 1d. In this case, the first and second opposite anglesϕandθare set to 2×tan<-1> 2<1/2> and 2×tan<-1> (1/2<1/2> ) respectively, and the inner wall surface of the recessed part 1c is of (111) plane.