| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument for measuring the light spot characteristics of scanning optical systems which can measure the various characteristic values of a light spot with high accuracy in a short time. SOLUTION: An instrument for measuring light spot characteristic which measures the light sport characteristic at a desired main scanning position on the surface to be scanned by condensing a laser beam on the surface to be scanned, as a light spot is provided with a plurality of kinds of optical sensors 5a-5d which are movably arranged on a directly-driven stage 6 so that the light receiving surfaces 5' of the sensors 5a-5d may become coincident with the surface to be scanned.
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