Toestel voor meten van een brandpunt van een belichtingssysteem gebruikt voor vervaardiging van een halfgeleiderinrichting.

摘要

An apparatus for measuring a focus of semiconductor exposure equipment is provided to make an exposure region correspond to a focus measurement region on a photoresist substrate, by installing a transparent electrode in a slit of a focus measurement unit. The focus measurement unit(30) has a non-transparent region which light cannot transmit, a transparent region which light can transmit and the transparent electrode installed in the transparent region. The photoresist substrate(59) is supported by a stage(60). A capacitance measurement unit(61) measures capacitance between the transparent electrode and the stage while adopting the transparent electrode and the stage as both electrodes.