ION BEAM/CHARGED-PARTICLE BEAM IRRADIATOR

摘要

PROBLEM TO BE SOLVED: To provide a versatile ion beam/charged-particle beam irradiator capable of coping with a conditions of a beam of a wider range. SOLUTION: In this ion beam/charged-particle beam irradiator provided with a post-stage energy analyzer, a post-stage energy analyzer comprises a deflecting electrode 24 and a deflection magnet 22 which are used by switching. The deflection magnet is a nearly square and has a space part at its center. The deflecting electrode is arranged in a vacuum chamber 23 arranged in the space of the deflection magnet with a suppression electrode 31. The deflecting electrode is arranged so that a deflection orbit of a beam by a magnetic field and a deflection orbit of a beam by electric field are overlapped with the deflection magnet. COPYRIGHT: (C)2006,JPO&NCIPI