发明名称 |
VIA HOLE STRUCTURE AND PROCESS FOR FORMATION THEREOF |
摘要 |
When an insulating film of a multilayer interconnected board or the like is made of two or more coatings so as to build up the required thickness, it can be difficult to provide a via hole with a suitably tapered shape such that when a metallic film for wiring is formed on the composite insulating film, the metal film can completely fill up the via holes. The via holes 7 of the invention are given a gradually increasing diameter from the bottom toward the top of the insulating layer 8 comprising a plurality of preferably photosensitive insulating resin films 2,5, by forming an aperture in each film 2,5 as it is applied, these apertures having successively smaller diameters. <IMAGE> |
申请公布号 |
KR960006986(B1) |
申请公布日期 |
1996.05.25 |
申请号 |
KR19920013868 |
申请日期 |
1992.08.01 |
申请人 |
FUJITSU K.K. |
发明人 |
TANI, MOTOAKI;MIYAHARA, SHOICHI;SASAKI, MAKOTO;HORIKOSHI, EIJI;KAWAMURA, ISAO |
分类号 |
H05K3/46;H01L21/48;H01L23/498;H05K3/00;(IPC1-7):H05K3/46 |
主分类号 |
H05K3/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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