| 摘要 |
A turn-off system is useful for turning off the valve of a gas container, in a fire or a sudden interruption of electric power, containing a poisonous or inflammable gas such as silane gas or hydrogen for use in production of semiconductor. The turn-off system includes a housing(6), an upper gear room(3), a power unit room(4) and a lower gear room(5) which are divided by an upper partition plate(2) and a lower one(1). A clutch unit(9) with gear trains is provided in the upper gear room. An air cylinder(7), an air motor(8) and a speed reducer(11) are installed in the power unit room, and an encoder unit(13) interacting with a timing belt(14) is provided over them. A lot of gears(17-19) are meshed in the lower gear room. A spring housing(15) with a clock-work spring(12) is provided under the lower gear room. A valve holder attached to a spline shaft(16a) is in connection with the clock-work spring(12) so as to rapidly turn off the valve.
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