发明名称 Method of fabricating an insulated gate bipolar transistor
摘要 There is disclosed an IGBT which includes an n+ layer (2A), an n- layer (2B), a p well region (3), an n+ diffusion region (4), a gate oxide film (5), a gate electrode (6) and an emitter electrode (8) around the upper major surface of a p+ substrate (1), similarly to conventional IGBTs. In the lower major surface of the p+ substrate (1) is formed an n+ diffusion region (10) which adapted not to reach the n+ layer (2A). The n+ diffusion region (10) and p+ substrate (1) are connected to a collector electrode (9). When there is a small potential difference between the emitter and collector electrodes, holes are injected from the p+ substrate into the n- layer to provide a low ON-resistance. When the potential difference is large, a depletion layer extending from the n+ diffusion region is brought into a reach-through state to limit an increase in the amount of injected holes. This prevents the device from being broken down due to an excessively increased current density.
申请公布号 US5372954(A) 申请公布日期 1994.12.13
申请号 US19930148628 申请日期 1993.11.08
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TERASHIMA, TOMOHIDE
分类号 H01L29/73;H01L21/331;H01L21/336;H01L29/08;H01L29/739;H01L29/78;(IPC1-7):H01L21/265 主分类号 H01L29/73
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