FORMING METHOD OF INSULATING FILM,申请号JP19960246375-传众专利搜索

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发明名称	FORMING METHOD OF INSULATING FILM
摘要
申请公布号	JPH1092814(A)	申请公布日期	1998.04.10
申请号	JP19960246375	申请日期	1996.09.18
申请人	TOSHIBA CORP	发明人	YASUDA NAOKI
分类号	H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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