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发明名称
SEMICONDUCTOR-MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH10163143(A)
申请公布日期
1998.06.19
申请号
JP19960316029
申请日期
1996.11.27
申请人
SONY CORP
发明人
TOUNOHARA TOMOYOSHI
分类号
H01L21/304;B08B1/04;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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