发明名称 |
MANUFACTURING METHOD OF PASSIVATION FILM FOR ORGANIC LED ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To stably form a passivation film of an organic LED element with quick film formation rate by easy operation. SOLUTION: The passivation film covers an organic layer and an electrode on a substrate. The passivation film is formed by a reactive pulse DC sputtering method. |
申请公布号 |
JP2001326071(A) |
申请公布日期 |
2001.11.22 |
申请号 |
JP20000145835 |
申请日期 |
2000.05.18 |
申请人 |
STANLEY ELECTRIC CO LTD |
发明人 |
SANO HIROYUKI;HIROHASHI MASATOSHI |
分类号 |
H05B33/04;H01L33/26;H01L33/44;H01L51/50;H05B33/10;H05B33/14 |
主分类号 |
H05B33/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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