| 摘要 |
PROBLEM TO BE SOLVED: To quantitatively and accurately express quality of a state of a scanning electron microscope device from an observation image of metal particles. SOLUTION: This evaluation method of the scanning electron microscope device is used for evaluating a state of the scanning electron microscope device from a metal particle image, and is characterized by including: an image input process of inputting the metal particle image; a noise removal process of removing noise of the input image; an image quality quantification process of quantifying the image quality of the image with noise removed therefrom to provide an image quality evaluation value; a determination process of determining the image quality based on the image quality evaluation value; and a display process of displaying the result of the determination. COPYRIGHT: (C)2008,JPO&INPIT
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