| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning jig for suppressing the occurrence of staining defect caused by foreign matter remaining on the wafer surface.SOLUTION: A cleaning jig 10 includes: an opening 11 into which one side 74 of a crystal wafer 70 as a leading end can be inserted in a second direction 82 perpendicular to a first direction 81; and side end holding parts 121, 122, 131, 132 for holding two sides (one side 72 and the other side 73) in parallel to each other in the second direction 82 of the crystal wafer 70 inserted from the opening 11 by point contact.SELECTED DRAWING: Figure 1 |
