| 摘要 |
PURPOSE:To minimize defect information, and also, to erase a moire and to detect a defect with high sensitivity by inspecting an image by attenuating a high frequency component which is obtained by bringing a periodic pattern to image pickup. CONSTITUTION:A body to be inspected 46 consisting of a shadow mask is brought to image pickup by a TV camera 40, and its reading signal is eliminated as to its high frequency component by an LPF 12, brought to A/D conversion and inputted to an image processor 42. In the processor 42, from a result of a screen addition processing of plural images which have displaced a pattern, image data is brought to subtraction processing and a defect is detected. |
