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发明名称
SELECTIVE ETCHING METHOD
摘要
申请公布号
JPH0234927(A)
申请公布日期
1990.02.05
申请号
JP19880185994
申请日期
1988.07.25
申请人
SONY CORP
发明人
NODA SANEYA
分类号
H01L21/302;H01L21/28;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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