THIN FILM FORMING DEVICE,申请号JP19880250913-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH02101159(A)	申请公布日期	1990.04.12
申请号	JP19880250913	申请日期	1988.10.06
申请人	MITSUBISHI ELECTRIC CORP	发明人	TANAKA NOBUO
分类号	C23C14/32;H01L21/203	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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