| 摘要 |
A laser beam profiler having a movable member on which is mounted a means adapted to be moved through a laser beam for measuring the profile of the laser beam. The profiler comprises an interferometer which uses a multimode diode laser to generate a reference laser beam and a distance measuring laser beam. A retro-reflector is rigidly attached to the movable member and varies the path length of the distance measuring laser beam as the movable member is moved. A photodetector responsive to the reference laser beam and the distance measuring laser beam as said movable member is moved provides a frequency modulated output signal, said output signal having an envelope, the amplitude of which varies as a function of DELTA l, where DELTA l is the difference in the path lengths of said reference and said distance measuring laser beams, said interferometer, including said movable member, being so arranged that the amplitude of said envelope of said output signal is maximum when DELTA l is zero.
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