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发明名称
SILICON WAFER
摘要
申请公布号
JPH06252154(A)
申请公布日期
1994.09.09
申请号
JP19930040177
申请日期
1993.03.01
申请人
TOSHIBA CERAMICS CO LTD
发明人
SHIRAI HIROSHI;YOSHIKAWA ATSUSHI;TAKEDA RYUJI;KURIHARA SEIJI;KASHIMA KAZUHIKO;SENSAI KOUJI
分类号
H01L21/02;H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/02
代理机构
代理人
主权项
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