| 摘要 |
<p>PURPOSE: To enhance the electron emission efficiency by furnishing an emitter electrode which can emit electrons from the tip of a columnar crystal generated through film formation of columnar crystal gathering. CONSTITUTION: A base electrode 23, insulating film 24, conductive film 25, and insulating film 29 are laminated on a base board 22, and a resist 30 is applied to be insulative film 29 so that a pattern 30a having circular hole mating with through hole 26 is formed. The insulative film 29, conductive film 25, and insulating film 24 are subjected to anisotropic etching in such a way as to suit the shape of the resist 30, the through holes 26 are formed where the base electrode 23 is exposed. On the base electrode 23 a columnar crystal gathering 27 is provided by film formation where a number of columnar crystals are contacted closely, and thus an emitter electrode is formed which can emit electrons from the tip of each columnar crystal. Then the insulative film 24 and insulating film 29 are etched selectively, and the edge 25a of the film 25 is protruded into the through hole 26 so that a gate electrode is accomplished.</p> |
