| 摘要 |
PROBLEM TO BE SOLVED: To provide a component which is superior in plasma resistant properties, which will not generate the gas of an organic substance or the like at high temperatures, which is superior in an injection molding property and an extrusion molding property, whose working costs are low, which is superior in mass productivity and which can be suitably used for a plasma treatment apparatus. SOLUTION: The component for the plasma treatment apparatus is composed of thermoplastic polyimide resin which has a repeated structure unit, expressed by chemical formula (1) and which is superior in the plasma resistant property. In the chemical formula (1), X represents a direct bond, -SO2-, -CO-, -C(CH3)2-, -C(CF3)2- or -S-, R1, R2, R3 and R4 respectively represent hydrogen, alkyl group, alkoxy group, alkyl halogenide group, alkoxy halogenide group or halogen group, and Y represents one kind or two or more kinds selected from among a group composed of chemical formula (2). |
