CONTROL OF PROCESS GASES IN SPECIMEN SURFACE TREATMENT SYSTEM USING PLASMA

摘要

A method of removing hydrocarbon contaminants from a surface of a specimen is provided. The method comprises the steps of: positioning a specimen within a vacuum chamber; maintaining the vacuum chamber at a suitable pressure; introducing into the vacuum chamber a process gas comprising a hydrogen precursor or a mixture of H2 and 02; and generating a plasma discharge in the vacuum chamber such that the specimen is subject to exposure to hydrogen and oxygen ions and hydrogen, oxygen, and hydroxyl radicals. Additional embodiments are described.