| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently wash off dirt within a reaction vessel by surely forming a flow of a wash liquid enough to remove the dirt deposited on an inner-wall side surface of the reaction vessel. SOLUTION: This washer 20 is equipped with a nozzle part 21 comprising a supply nozzle 211, a suction nozzle 213 with its end situated vertically somewhat below an end of the supply nozzle 211, and an overflow nozzle 215 with its end situated vertically above an end of the supply nozzle 211. The supply nozzle 211 has an inner diameter area larger than the area of a portion for holding a reaction liquid or wash water. The supply nozzle 211 is disposed so that a gap for letting flow wash water supplied from the supply nozzle 211 is given between its outer wall surface and the whole area of an inner wall surface of the reaction vessel C. Wash water supplied from the supply nozzle 211 flows through the gap between the outer wall surface of the supply nozzle 211 and the inner wall surface of the reaction vessel C, and is sucked by the overflow nozzle 215. COPYRIGHT: (C)2008,JPO&INPIT
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