System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same

摘要

Provides are a system of controlling a diameter of a single crystal ingot and a single crystal ingot growing apparatus including the same. The system of controlling a diameter of a single crystal ingot includes: a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass Filter (LPF) removing short period noise from measured data from the diameter measuring sensor; and an Automatic Diameter Control (ADC) sensor controlling the diameter of the single crystal ingot through controlling of a pull speed by using data having the noise removed as current data.

主权项

1. A system for controlling a diameter of a single crystal ingot, the system comprising:
a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass Filter (LPF) removing short period noise from measured data from the diameter measuring sensor, wherein the LPF is composed of a circuit including a resistor with a resistance value R and a capacitor with a capacitance value C, the LPF filtering an input voltage Vin as a function of time (s) and outputting an output voltage Vout according to the equation Vout (s)=Vin (s) (1/RCs+1), the filter having a time constant (f) ranging from 1 to 15 seconds, the time constant f a function of the resistance value R and the capacitor value C; and an Automatic Diameter Control (ADC) sensor controlling the diameter of the single crystal ingot through controlling a pull speed by using data having the noise removed as current data, wherein the ADC sensor controls an average value AVE described by the formula AVE=((a multiple of an ingot rotation period+the rotation period/2)/a raw data measurement interval when controlling the pull speed).