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发明名称
WERKWIJZE VOOR DE VERVAARDIGING VAN EEN HALFGELEIDER- INRICHTING.
摘要
申请公布号
NL8004586(A)
申请公布日期
1981.02.17
申请号
NL19800004586
申请日期
1980.08.13
申请人
HITACHI, LTD. TE TOKIO.
发明人
分类号
H01L21/3213;G03F7/26;H01L21/027;H01L21/28;H01L21/302;H01L21/306;H01L21/3065;H01L21/3205;H01L21/768;(IPC1-7):H01L21/30
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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