发明名称 EXIMER LASER DEVICE PROVIDEO WITH AUTOMATIC PRELIMINARY IONIZATION
摘要 PURPOSE:To facilitate regulating a preliminary ionization rate and improve efficiency of energy transfer by a method wherein a closed circuit is composed of a charging capacitor, a high voltage and large current switching device, a rectifier, a voltage dividing capacitor and a preliminary ionization discharge capacitor and both terminals of the preliminary ionization discharge capacitor are connected to both ends of preliminary ionization electrodes. CONSTITUTION:A plurality of pairs of preliminary ionization electrodes 7 are provided in a laser tube 11 and one end of each pair is connected to a cathode 10 through a reactor 8. The other end of each pair of the preliminary ionization electrodes 7 is connected to the junction point between the voltage dividing capacitor 5 and the preliminary discharge capacitor 4 of a closed circuit which is composed of a charging capacitor 2, a high voltage and large current switching device 1, a rectifier 6, a voltage dividing capacitor 5 and a preliminary discharge capacitor 4 which are connected in series. With this constitution, as the main discharge is started by the electron emission from the cathode region, the cathode region can be sufficiently ionized preliminarily. Therefore, the preliminary ionization rate can be regulated so that the efficiency of energy transfer from the charging capacitor to the main discharge capacitor can be improved.
申请公布号 JPS62249493(A) 申请公布日期 1987.10.30
申请号 JP19860092113 申请日期 1986.04.23
申请人 HITACHI LTD 发明人 SASAKI HIROHARU;KAWAKUBO YUKIO
分类号 H01S3/097;H01S3/0971 主分类号 H01S3/097
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