FORMATION OF THIN FILM AND FORMING DEVICE,申请号JP19890036125-传众专利搜索

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发明名称	FORMATION OF THIN FILM AND FORMING DEVICE
摘要
申请公布号	JPH02217469(A)	申请公布日期	1990.08.30
申请号	JP19890036125	申请日期	1989.02.17
申请人	HITACHI LTD	发明人	OKUDAIRA HIDEKAZU;NISHIMATSU SHIGERU
分类号	C23C14/14;C23C16/00;C23C16/02;C23C16/04;C23C16/44;C23C16/48	主分类号	C23C14/14
代理机构		代理人
主权项
地址

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