METALLIC FILM RESISTOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a metallic film resistor which is composed of a homogeneous alloy film and has excellent characteristics such as a low resistance- temperature coefficient by forming a plurality of kinds of metallic films by a pulse electroplating method in a plating bath containing a plurality of metal salts. SOLUTION: A resistor film composed at least of two metals, for example, a plating copper-nickel alloy film 2 is formed on an insulating substrate 1. The layered metallic film 2 in which a copper nickel alloy layer containing copper at a high concentration and another copper-nickel alloy layer containing copper at low concentration are alternately deposited electrically by a pulse electroplating method in which a low current-density pulse of 0.08-0.4A/dm<2> and a high current-density pulse 0.1-2A/dm<2> are alternately impressed by using a pyrophosphoric acid batch as a plating bath. The pule electroplating is performed without agitating the pyrophosphoric acid path. When the metallic film 2 is formed, the film 2 is crystallized by heat-treating the film 2 at >=600 deg.C in an inert gas or reducing atmosphere.