| 摘要 |
A mechanical sensor is provided, which includes: a magnetic layer having permeability which is changed in accordance with stress generated therein; a coil having at least two terminals, allowing an electric current to flow therebetween to generate a magnetic flux, thereby magnetizing the magnetic layer; and a substrate integrally supporting the magnetic layer and the coil, wherein the coil is a planar coil including at least one winding, each winding having a U-shaped portion formed of a first conductive line portion, a second conductive line portion, and a connecting portion connecting the first and second conductive line portions, the first and second conductive line portions extending in a first direction, and impedance between the terminals is changed in accordance with a change of inductance caused by a change of the permeability of the magnetic layer. <IMAGE> |
