| 摘要 |
A resonant shaker includes a support tray for supporting a target carrier. A sensor generates an electrical signal that is related to an acceleration of the support tray. A linear drive motor includes an armature that is coupled to the support tray. The linear drive motor provides an oscillating drive force to the support tray in response to a drive current applied to the linear drive motor. The resonant shaker also includes a controller. The controller receives the electrical signal from the sensor and a drive signal that is related to the drive current. The controller transmits a modified drive current to the linear drive motor in response to a predetermined phase relationship between the electrical signal and the drive signal.
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