发明名称 |
Portable microwave plasma systems including a supply line for gas and microwaves |
摘要 |
Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.
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申请公布号 |
US7271363(B2) |
申请公布日期 |
2007.09.18 |
申请号 |
US20040931223 |
申请日期 |
2004.09.01 |
申请人 |
AMARANTE TECHNOLOGIES, INC. |
发明人 |
LEE SANG HUN;KIM JAY JOONGSOO;KINOSHITA TOGO |
分类号 |
B23K10/00;A61B18/18 |
主分类号 |
B23K10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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