Scanning probe microscope

摘要

A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.

主权项

1. A scanning probe microscope comprising:
a stage on which a sample is mounted; a diamond probe in electrical contact with the sample during measurement; a measuring unit configured to measure a characteristic of the sample using scanning spread resistance microscopy based on an amount of electrical current flowing through the probe; and a controller configured to move at least one of the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample, the scanning trajectory including a plurality of linear segments, wherein each pair of adjacent linear segments forms an angle that is 90 degrees or less, a measurement trajectory coincides with the scanning trajectory and begins at an outer side and ends at an inner side, a distance between each adjacent parallel portions of the measurement trajectory is less than a width of the measurement trajectory, and said each adjacent parallel portions of the measurement trajectory overlap one another.