摘要 |
PROBLEM TO BE SOLVED: To stably obtain an AIN sintered compact having high thermal conductivity by incorporating a surfactant into a green compact and adjusting the content of C in a degreased compact with the C derived from an org. component at the time of calcining the green contact contg. AlN and the org. component. SOLUTION: The AlN sintered compact is obtd. by degreasing and calcining the green compact consisting of an inorg. component consisting essentially of AlN power and the org. component consisting essentially of an org. binder. At this time, the surfactant is incorporated into the green compact as the org. component and the content of the C to be present in the degreased compact is adjusted by the carbon derived from the org. component described above without separately adding the carbon. The surfactant is used in combination as the org. component constituting the green compact, by which the dispersibility of the org. component in the green compact is improved and the carbon derived from the org. component existing in the degreased compact is highly dispersed. The AlN sintered compact having the high thermal conductivity is thus stably obtd. |