| 摘要 |
PURPOSE:To make it possible to analyze the structure of defects from the surface of a changing a taking-out angle of an electron energy detector with respect to the surface of a specimen, and measuring the intensity of the electrons which are excited by the standing wave of X rays. CONSTITUTION:X rays from an X-ray source 16 are inputted into a vacuum chamber 10 through an incident window 13. Bragg reflection occurs from a specimen 12. At this time, the intensity of electrons emitted from the specimen is measured with a detector 15. In order to confirm the fact that the Bragg reflection occurs from the specimen 12, the X rays which are emitted from the specimen through an emitting window 14 are measured with a scintillation counter 17. Since it is necessary to rotate the specimen 12 at a specified accuracy, a rotary shaft 11 is rotated in the vicinity of the Bragg reflection, and the standing wave of the X rays is measured. In this way, the structure of the defects in the depth direction in the specimen can be obtained. |
