ALUMINUM NITRIDE-BASED SINTERED COMPACT, CORROSION- RESISTANT MEMBER, EMBEDDED METAL PRODUCT AND APPARATUS FOR HOLDING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To further improve the corrosion resistance of an aluminum nitride- based sintered compact, especially the corrosion resistance to a plasma of a halogen-based corrosive gas. SOLUTION: This aluminum nitride-based sintered compact consists essentially of aluminum nitride has a polycrystalline structure of aluminum nitride crystals and contains magnesium. The sintered compact contains the magnesium in an amount of preferably >=0.1 and <=20 wt.% expressed in terms of an oxide and has >=1×107 Ω.cm volume resistivity at 700 deg.C and <=80 W/m.K thermal conductivity. At least a part of the magnesium forms a solid solution in the aluminum nitride crystals and the constituent phase is substantially regarded as an aluminum nitride single phase by an X-ray diffractometry. The content of metal impurities except the magnesium is <=600 ppm.