| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an X-ray mask structure in which a holding frame can be used as an X-ray shield layer and a reinforcing body and the holding frame can be bonded rigidly while ensuring high positional accuracy. SOLUTION: The X-ray mask structure comprises an X-ray absorber 13, a supporting film 12, a holding frame 13, and a reinforcing body 14 wherein the holding frame 13 and reinforcing body 14 are bonded through a metal film or multilayer metal film 15 having alkaline resistance.</p> |
