发明名称 |
REVERSED FLEXIBLE TFT BACK-PANEL BY GLASS SUBSTRATE REMOVAL |
摘要 |
The process of fabricating a flexible TFT back-panel includes depositing etch stop material on a glass support. A matrix of contact pads, gate electrodes and gate dielectric are deposited overlying the etch stop material. Vias are formed through the dielectric in communication with each pad. A matrix of TFTs is formed by depositing and patterning metal oxide semiconductor material to form an active layer of each TFT overlying the gate electrode. Source/drain metal is deposited on the active layer and in the vias in contact with the pads, the source/drain metal defining source/drain terminals of each TFT. Passivation material is deposited in overlying relationship to the TFTs. A color filter layer is formed on the passivation material and a flexible plastic carrier is affixed to the color filter. The glass support member and the etch stop material are then etched away to expose a surface of each of the pads. |
申请公布号 |
WO2016140975(A1) |
申请公布日期 |
2016.09.09 |
申请号 |
WO2016US20278 |
申请日期 |
2016.03.01 |
申请人 |
CBRITE INC. |
发明人 |
SHIEH, Chan-Long;FOONG, Fatt;YU, Gang;WANG, Guangming |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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