| 摘要 |
PURPOSE:To quickly, uniformly, and completely perform rinsing, by installing plural photomasks around a central revolving body which discharges a washing liquid. CONSTITUTION:Water is supplied through a water supply pipe 17 communicated with a central cavity 13. When a motor is rotated simultaneously with the water supply, the water supplied to the central cavity 13 is radiated to the outside of a revolving body 12 via radial grooves as shown by arrows VI as the revolving body 12 rotates, and contacts with photomasks 3 and washes them. After washing, the water flows over the photomasks 3 toward the bottom and falls into a tank 11, and then, is discharged through a discharge pipe. The water is radiated with considerable intensity by the rotation of the revolving body 12 and the photomasks 3 receive the shower with considerable intensity. Therefore, the surface of the photomasks 3 is sufficiently rinsed. Moreover, since radial grooves 14 are arranged at regular intervals, the water is uniformly radiated against all photomasks 3. |
