摘要 |
PURPOSE:To enhance heat resistance and response, by a method wherein a diffusion layer is formed into a double structure and one layer is formed coarsely in a relatively thick state by a plasma spraying method while the other layer is formed as an extremely dense and relatively thin layer by a sol/gel method. CONSTITUTION:An element main body 1 is composed of a zirconia solid electrolyte partially stabilized by yttrium oxide and platinum is plated to the inner and outer surfaces of the element main body 1 as reactive electrodes 2a, 2b. Further, a magnesia spinnel is applied as the first layer 3a of a gas diffusion resistance layer by a plasma spraying method and the thickness of the layer 3a is set to 10-500mum, desirably, 20-200mum. Furthermore, the second layer 3b is formed on the layer 3a as a highly dense ceramic film by a sol/gel method in a thickness of 0.01-20mum, desirably 0.5-5mum. By reducing the thickness of the total layer as mentioned above, heat resistance and response can be enhanced. |