发明名称 METHOD AND APPARATUS FOR ROTARY APPLICATION
摘要 PROBLEM TO BE SOLVED: To prevent the undesirable rotation of an upper part plate and hold the linkage between a rotation table and the plate always constant. SOLUTION: When an upper part rotary plate 3 is removed upward, by the relative vertical movement among the rotary plate 3, an upper part support plate 4, and a fixed support member 16, the engagement projection 29 of the support member 16 is inserted into the cylinder 32 of a ring-shaped plate 31, the rotary plate 3 and the support plate 4 are suspended unrotatably, supported, and elevated. When the rotary plate 3 and the support plate are bonded to a rotary table 2, by the descent of the support member 16, the relative vertical movement among the rotary plate 3, the support plate 4. and the support member 16 is generated, the projection 29 is removed from the cylinder 32, the rotary plate 3 and the support plate 4 are made freely rotatable integrally with the rotary table 2, so that the freely attachable/detachable installation of the ring plate of the table 2 and the support plate 4 can be done surely always in a constant positional relationship.
申请公布号 JP2000354820(A) 申请公布日期 2000.12.26
申请号 JP20000143640 申请日期 2000.05.16
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YAMAMOTO MASAAKI
分类号 H01L21/027;B05C11/08;B05D1/40;G03F7/16 主分类号 H01L21/027
代理机构 代理人
主权项
地址