Fluid Servo Valve and Fluid Servo Apparatus

摘要

The present invention controls the pressure and flow rate of fluid, in order to obtain uniform performance, configure a closed loop magnetic circuit so as to include an electromagnet, a flapper, and a yoke material, and elastically deform the flapper itself by Maxwell attractive force generated between a magnetic pole of the electromagnet and the flapper to make the separation distance between the nozzle and the flapper variable. As opposed to a rigid flapper structure that swingably moves around a supporting point, like a conventional servo valve, the electromagnet, the magnetic pole, the nozzle, the flapper, and the like are arranged such that a change in magnetic gap directly leads to a change in air gap.

主权项

1. A fluid servo valve comprising:
a nozzle of which a flow path is connected to a fluid supply source; a flapper that is provided so as to face toward a tip part of the nozzle; a flapper supporting member that fixes a part of the flapper; and an electromagnet that is provided so as to generate an attractive force on the flapper, the fluid servo valve being configured to deform the flapper by the attractive force of the electromagnet to change a separation distance between the tip part of the nozzle and the flapper.